The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Dec. 15, 2015
Korea Research Institute of Standards and Science, Daejeon, KR;
Korea Research Institute of Standards and Science, Daejeon, KR;
Abstract
Provided are a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same, and more particularly, a rotating-element spectroscopic ellipsometer and a method for measurement precision prediction of a rotating-element spectroscopic ellipsometer capable of calculating the measurement precision of the rotating-element spectroscopic ellipsometer based on a theoretical equation on standard deviations of ellipsometric parameters for a sample, a recording medium storing program for executing the same, and a computer program stored in a medium for executing the same.