The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Jul. 16, 2015
Macronix International Co., Ltd., Hsinchu, TW;
Ching-Hsiung Lee, Hsinchu, TW;
Shih-Chang Tsai, Hsinchu, TW;
MACRONIX International Co., Ltd., Hsinchu, TW;
Abstract
Provided is a structure with a conductive plug including a substrate, a first dielectric layer, an etch stop layer, a second dielectric layer, a conductive plug and a liner. The substrate has a conductive region therein. The first dielectric layer, the etch stop layer and the second dielectric layer are sequentially formed on the substrate and have at least one opening therethrough. Besides, the opening has a substantially vertical sidewall. The conductive plug fills in the opening and is electrically connected to the conductive region. The liner surrounds the upper portion of the conductive plug. A method of forming a structure with a conductive plug is further provided.