The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Feb. 05, 2014
Rudolph Technologies, Inc., Flanders, NJ (US);
The Regents of University of Colorado, Denver, CO (US);
Todd Murray, Golden, CO (US);
Manjusha Mehendale, Morristown, NJ (US);
Michael Kotelyanskii, Chatham, NJ (US);
Robin Mair, West Chicago, IL (US);
Priya Mukundhan, Lake Hopatcong, NJ (US);
RUDOLPH TECHNOLOGIES, INC., Bloomington, MN (US);
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE, Denver, CO (US);
Abstract
A system and method for identifying one or more characteristics of a structure formed into a substrate is herein disclosed. Surface and bulk acoustic waves are induced in the substrate and travel past a structure of interest where the acoustic waves are sensed. Information concerning one or more characteristics of the structure is encoded in the wave. The encoded information is assessed to determine the characteristic of interest.