The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Apr. 24, 2013
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventor:
Francois Rieutord, Saint Egreve, FR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 25/065 (2006.01); H01L 23/00 (2006.01); H01L 21/18 (2006.01); H01L 21/20 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76251 (2013.01); H01L 21/187 (2013.01); H01L 21/2007 (2013.01); H01L 21/76254 (2013.01); H01L 24/80 (2013.01); H01L 25/0657 (2013.01); H01L 21/302 (2013.01);
Abstract
The present invention relates to a process for direct bonding two substrates, comprising at least: (a) bringing the surfaces to be bonded of said substrates in close contact; and (b) propagating a bonding wave between said substrates, characterised in that said substrates are kept, during step (b), in an atmosphere of a gas having a negative Joule-Thomson coefficient at the temperature and pressure of said atmosphere.