The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 21, 2017

Filed:

Jan. 19, 2016
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Yuji Kohno, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/141 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 2237/141 (2013.01); H01J 2237/26 (2013.01);
Abstract

A multipole lens is provided which is for use in electron microscopy and which is simple in structure but capable of producing X- and Y-components of a quadrupole field and X- and Y-components of an octopole field. The multipole lens () comprises: first through twelfth polar elements (-to-); first through sixteenth coils (-to-); a first power supply (-) for supplying currents to the coils (----); a second power supply (-) for supplying currents to the coils (----); a third power supply (-) for supplying excitation currents to the coils (----); and a fourth power supply (-) for supplying excitation currents to the coils (----). The coils (--------) produce magnetic fields in a first direction. The coils (--------) produce magnetic fields in a direction opposite to the first direction.


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