The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2017
Filed:
Dec. 13, 2012
Marc Léon Van Der Gaag, Veldhoven, NL;
Leonarda Hendrika Van Den Heuvel, Aarle-Rixtel, NL;
Arjan Hubrecht Josef Anna Martens, Valkenburg, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
Marc Léon Van Der Gaag, Veldhoven, NL;
Leonarda Hendrika Van Den Heuvel, Aarle-Rixtel, NL;
Arjan Hubrecht Josef Anna Martens, Valkenburg, NL;
Frank Johannes Jacobus Van Boxtel, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An extraction system, including a pump to pump gas along a conduit to a check valve configured to open at an upstream pressure over a certain magnitude, a pressure sensor to generate a signal indicative of a pressure of gas between the pump and the check valve, and a controller configured to generate a stop signal if a signal from the pressure sensor indicates that the pressure of gas between the pump and the check valve is below a certain magnitude.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile