The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Jul. 08, 2015
Yongsung Park, Suwon-si, KR;
Kiwoong Kim, Hwaseong-si, KR;
Sangyong Kim, Suwon-si, KR;
Sechung OH, Yongin-si, KR;
Youngman Jang, Hwaseong-si, KR;
Yongsung Park, Suwon-si, KR;
Kiwoong Kim, Hwaseong-si, KR;
Sangyong Kim, Suwon-si, KR;
Sechung Oh, Yongin-si, KR;
Youngman Jang, Hwaseong-si, KR;
Abstract
Methods of fabricating MRAM devices are provided along with a processing apparatus for fabricating the MRAM devices. The methods may include forming a ferromagnetic layer, cooling the ferromagnetic layer to a temperature within a range of between about 50° K to about 300° K, forming and oxidizing one or more Mg layers on the cooled ferromagnetic layer to form an MgO structure, forming a free layer on the MgO structure, and forming a capping layer on the free layer.