The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Aug. 30, 2013
Tokyo Electron Limited, Tokyo, JP;
Hiroshi Yamada, Nirasaki, JP;
Hiroki Obi, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A probe card attaching method makes it easy to attach/detach a probe card to/from a transfer stage. In a wafer inspection apparatus, a reference position is determined by moving a transfer stageto align a stage-side camerawith a tester-side camerain a tester, a first distance from the reference position to a center of a pogo framein the testeris determined by checking a pin markin the testerwith the stage-side camera, a second distance from the reference position to a center of a probe cardis determined by checking a target markin the probe cardwith the tester-side camera. Then, the transfer stageis moved to allow the probe cardto face the pogo framebased on the reference position, the first distance, and the second distance.