The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Sep. 23, 2013
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Rolf Freimann, Aalen, DE;
Heiko Feldmann, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A device including an imaging optical unit () imaging an object field () in an image field (), a structured mask (), arranged in the region of the object field () via reticle holder () displaceable in a reticle scanning direction (), and a sensor apparatus (), arranged in the region of the image field () via a substrate holder () displaceable in a substrate scanning direction (). The mask () has at least one measurement structure () to be imaged on the sensor apparatus (), wherein the sensor apparatus () includes at least one line sensor () with a multiplicity of sensor elements (), and affords the possibility of testing the imaging optical unit () during the displacement of the substrate holder () for exposing a substrate () arranged on the substrate holder.