The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Oct. 13, 2014
Sunedison Semiconductor Limited (Uen201334164h), Singapore, SG;
Peter Albrecht, O'Fallon, MO (US);
Sumeet Bhagavat, St. Charles, MO (US);
Alex Chu, Hsinchu, TW;
Ichiro Yoshimura, Shimotsuke, JP;
Yunbiao Xin, Palo Alto, CA (US);
Roland Vandamme, Wentzville, MO (US);
SunEdison Semiconductor Limited (UEN201334164H), Singapore, SG;
Abstract
A polishing head assembly for single side polishing of silicon wafers is provided. The polishing head assembly includes a polishing head and a cap. The polishing head has a recess along a bottom portion, the recess having a recessed surface. The cap is positioned within the recess, and has an annular wall and a floor extending across the annular wall. The floor is spaced from the recessed surface to form a chamber therebetween. The chamber is configured to be pressurized for deflecting the floor. The annular wall is attached to the polishing head with an adhesive.