The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2017

Filed:

Jan. 22, 2016
Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Yu-Cheng Lin, Tainan, TW;

Hui-Shen Shih, Changhua County, TW;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 29/78 (2006.01); H01L 21/31 (2006.01); H01L 29/51 (2006.01); H01L 23/532 (2006.01); H01L 23/535 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/51 (2013.01); H01L 21/022 (2013.01); H01L 21/02126 (2013.01); H01L 21/02274 (2013.01); H01L 21/76801 (2013.01); H01L 21/76819 (2013.01); H01L 21/76822 (2013.01); H01L 21/76825 (2013.01); H01L 21/76826 (2013.01); H01L 21/76835 (2013.01); H01L 21/76838 (2013.01); H01L 23/535 (2013.01); H01L 23/53295 (2013.01); H01L 29/42376 (2013.01); H01L 29/78 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A semiconductor device is disclosed. The semiconductor device includes: a substrate; a first tensile dielectric layer on the substrate; a metal gate in the first tensile dielectric layer; a second tensile dielectric layer on the first tensile dielectric layer; and a contact plug in the first tensile dielectric layer and the second tensile dielectric layer. Preferably, the top surface of the contact plug is even with the top surface of the second tensile dielectric layer, and a carbon content of the second tensile dielectric layer is greater than the carbon content of the first tensile dielectric layer.


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