The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 07, 2017

Filed:

Jun. 17, 2015
Applicant:

Mochii, Inc., Seattle, WA (US);

Inventors:

Christopher Su-Yan Own, Seattle, WA (US);

Matthew Francis Murfitt, Seattle, WA (US);

Assignee:

Mochii, Inc., Seattle, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2006.01); G01N 23/22 (2006.01); H01J 37/28 (2006.01); G02B 21/00 (2006.01); G02B 21/36 (2006.01); H01J 37/147 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); G02B 21/008 (2013.01); G02B 21/0048 (2013.01); G02B 21/367 (2013.01); H01J 37/1471 (2013.01); H01J 37/20 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/28 (2013.01);
Abstract

A charged-particle beam microscope is provided for imaging a sample. The microscope has a stage to hold a sample and a charged-particle beam column to direct a charged-particle beam onto the sample. The charged-particle beam column includes a charged-particle beam source to generate a charged-particle beam, and charged-particle beam optics to converge the charged-particle beam onto the sample. The microscope also has a light beam column to direct a light beam onto the sample. The light beam column includes a light beam source to generate a light beam, and light-beam optics to converge the light beam onto the sample. One or more detectors are provided to detect charged-particle and light radiation emanating from the sample to generate an image. A controller to analyze the detected charged-particle radiation and detected light radiation to generate an image of the sample.


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