The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Feb. 17, 2012
Tuomas Pensala, Helsinki, FI;
Antti Jaakkola, VTT, FI;
Maria Ganchenkova, Aalto, FI;
Mika Prunnila, Helsinki, FI;
Jyrki Kiihamaki, Helsinki, FI;
Tuomas Pensala, Helsinki, FI;
Antti Jaakkola, VTT, FI;
Maria Ganchenkova, Aalto, FI;
Mika Prunnila, Helsinki, FI;
Jyrki Kiihamaki, Helsinki, FI;
Teknologian tutkimuskeskus VTT Oy, Espoo, FI;
Abstract
The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.