The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Mar. 17, 2010
Applicants:
William D. Lee, Newburyport, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Marvin R. Lafontaine, Kingston, NH (US);
Inventors:
William D. Lee, Newburyport, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
Marvin R. LaFontaine, Kingston, NH (US);
Assignee:
AXCELIS TECHNOLOGIES, INC., Beverly, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/683 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); H01J 37/20 (2013.01); H01J 37/3171 (2013.01); H01L 21/67109 (2013.01); H01J 2237/002 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/2065 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/31701 (2013.01);
Abstract
Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece.