The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
May. 29, 2014
Tokyo Electron Limited, Tokyo, JP;
Tooru Nakamura, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
In one embodiment, a clean gas supply mechanism includes a supply path having an upstream end provided with a gas intake port, and a downstream end connected to a treatment chamber. The supply path is provided therein with a fan, and a filter disposed upstream of the fan. A return path branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber and is connected to the supply path at a second position downstream of the filter and upstream of the fan. A switching mechanism selectively switches between a first state where the clean gas flows into the treatment chamber, and a second state where the clean gas returns to the supply path through the return path.