The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Apr. 22, 2014
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Abstract
A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid and an acid generator which generates acid upon exposure, the base component containing a polymeric compound containing a structural unit represented by general formula (a0-1) and the acid generator containing a compound represented by general formula (b1). In the formulae, R represents H, an alkyl group of Cor a halogenated alkyl group of C; Yarepresents a single bond or a divalent linking group; Laand Larepresents —SO— or —C(═O)—; Rarepresents a cyclic group which may have a substituent and the like; nand nrepresents 0 or 1; Rrepresents a cyclic group of Cwhich may have a substituent; Vrepresents a single bond or an alkylene group of C; Lrepresents an ester bond; Yrepresents an alkylene group of Cwhich may have a fluorine atom; m represents an integer of 1 or more; and Mrepresents an organic cation having a valency of m.