The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2017

Filed:

Jan. 04, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Kangguo Cheng, Schenectady, NY (US);

Joseph Ervin, Slingerlands, NY (US);

Juntao Li, Cohoes, NY (US);

Chengwen Pei, Danbury, CT (US);

Geng Wang, Stormville, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); G01N 27/414 (2006.01); G01N 33/487 (2006.01); H01L 29/41 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4145 (2013.01); G01N 33/48721 (2013.01); H01L 21/845 (2013.01); H01L 27/1211 (2013.01); H01L 29/0847 (2013.01); H01L 29/413 (2013.01);
Abstract

A nanoscale electrode device can be fabricated by forming a pair of semiconductor fins laterally spaced from each other by a uniform distance and formed on a substrate. The pair of semiconductor fins can function as a pair of electrodes that can be biased to detect the leakage current through a nanoscale string to pass therebetween. A nanochannel having a uniform separation distance is formed between the pair of semiconductor fins. The nanochannel may be defined by a gap between a pair of raised active regions formed on the pair of semiconductor fins, or between proximal sidewalls of the pair of semiconductor fins. An opening is formed through the portion of the substrate underlying the region of the nanochannel to enable passing of a nanoscale string.


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