The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2017
Filed:
Mar. 15, 2016
Applicant:
V Technology Co., Ltd., Yokohama-shi, JP;
Inventors:
Shigeto Sugimoto, Yokohama, JP;
Koichi Kajiyama, Yokohama, JP;
Michinobu Mizumura, Yokohama, JP;
Syuji Kudo, Yokohama, JP;
Eriko Kimura, Yokohama, JP;
Hany Maher Aziz, Oakville, CA;
Yoshitaka Kajiyama, Waterloo, CA;
Assignee:
V Technology Co., Ltd., Yokohama-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); B05B 15/04 (2006.01); H01L 51/00 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); C23C 14/48 (2006.01); B23K 26/00 (2014.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
B05B 15/045 (2013.01); B23K 26/0087 (2013.01); B23K 26/342 (2015.10); B23K 26/382 (2015.10); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 14/48 (2013.01); H01L 51/0011 (2013.01); H01L 51/5012 (2013.01); Y10T 156/10 (2015.01);
Abstract
A deposition mask for forming a thin film pattern having a predetermined shape on a substrate by deposition, includes a resin film that transmits visible light and has an opening pattern penetrating through the resin film and having the same shape and dimension as those of the thin film pattern so as to correspond to a preliminarily determined forming region of the thin film pattern on the substrate.