The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2017
Filed:
Oct. 11, 2013
Applicant:
Hitachi Chemical Company, Ltd., Tokyo, JP;
Inventors:
Hideo Nakako, Ibaraki, JP;
Yasushi Kumashiro, Ibaraki, JP;
Takaaki Noudou, Ibaraki, JP;
Maki Inada, Ibaraki, JP;
Kyoko Kuroda, Ibaraki, JP;
Assignee:
Hitachi Chemical Company, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/08 (2006.01); C09K 13/00 (2006.01); H01L 31/0224 (2006.01); H01L 21/311 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); H01L 21/31111 (2013.01); H01L 31/022425 (2013.01); H01L 31/18 (2013.01); Y02E 10/50 (2013.01);
Abstract
An etching material including at least one boron compound selected from a Lewis acid that includes, in its structure, boron and a halogen that is bonded to the boron, a salt of the Lewis acid and a compound that generates the Lewis acid.