The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 2017

Filed:

Dec. 29, 2014
Applicant:

Clean Factomation, Inc., Hwaseong-si, KR;

Inventors:

Ho Geun Lee, Asan-si, KR;

Dong Gyu Yoo, Asan-si, KR;

Jae Hyun Lee, Asan-si, KR;

Jung Young Lee, Asan-si, KR;

Jun Han Lee, Asan-si, KR;

Jun Pil Yun, Asan-si, KR;

Ju Sik Jo, Asan-si, KR;

Yong Hwan Gwon, Asan-si, KR;

Sung Goo Choi, Asan-si, KR;

Assignee:

Daifuku Co., Ltd., Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 15/00 (2006.01); B08B 15/02 (2006.01); B65G 1/06 (2006.01); F24F 7/06 (2006.01); H01L 21/683 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B08B 15/02 (2013.01); B65G 1/065 (2013.01); F24F 7/065 (2013.01); H01L 21/67389 (2013.01); H01L 21/67733 (2013.01); H01L 21/67769 (2013.01); H01L 21/683 (2013.01);
Abstract

Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.


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