The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2017

Filed:

May. 15, 2015
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Ming Hsien Tsai, New Taipei, TW;

Hsieh-Hung Hsieh, Tapei, TW;

Tzu-Jin Yeh, Hsinchu, TW;

Chewn-Pu Jou, Hsinchu, TW;

Sa-Lly Liu, HsinChu, TW;

Fu-Lung Hsueh, Koahsiung, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/08 (2006.01); H01L 23/522 (2006.01); H01L 49/02 (2006.01); H01L 23/538 (2006.01); H01L 23/58 (2006.01); H01L 27/06 (2006.01); H01L 27/07 (2006.01); H01L 23/48 (2006.01); H03F 1/26 (2006.01); H03F 3/04 (2006.01); H01L 27/092 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 23/481 (2013.01); H01L 23/5225 (2013.01); H01L 23/5227 (2013.01); H01L 23/5384 (2013.01); H01L 23/585 (2013.01); H01L 27/0688 (2013.01); H01L 27/0705 (2013.01); H01L 28/10 (2013.01); H03F 1/26 (2013.01); H03F 3/04 (2013.01); H01L 27/092 (2013.01); H01L 2924/0002 (2013.01); H03F 2200/294 (2013.01); H03F 2200/372 (2013.01);
Abstract

The three dimensional (3D) circuit includes a first tier including a semiconductor substrate, a second tier disposed adjacent to the first tier, a three dimensional inductor including an inductive element portion, the inductive element portion including a conductive via extending from the first tier to a dielectric layer of the second tier. The 3D circuit includes a ground shield surrounding at least a portion of the conductive via. In some embodiments, the ground shield includes a hollow cylindrical cage. In some embodiments, the 3D circuit is a low noise amplifier.


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