The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2017
Filed:
Feb. 27, 2015
Globalfoundries Inc., Grand Cayman, KY;
Min Gyu Sung, Latham, NY (US);
Catherine B. Labelle, Wappingers Falls, NY (US);
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
A method includes forming a plurality of fins above a substrate. A first mask layer is formed above a first subset of the fins. First portions of the fins in the first subset exposed by a first opening in the first mask layer are removed to define, for each of the fins, a first fin segment and a second fin segment, each having a cut end surface. A first liner layer is formed on at least the cut end surface of the first fin segment for each of the fins in the first subset. A second mask layer having a second opening is formed above a second subset of the plurality of fins. An etching process removes second portions of the second subset of fins exposed by the second opening. The first liner layer protects the cut end surface of at least the first fin segment during the removing.