The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2017
Filed:
May. 07, 2013
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 37/00 (2006.01); H01L 21/683 (2006.01); B32B 37/10 (2006.01); H01L 21/67 (2006.01); B32B 37/12 (2006.01); B32B 41/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/683 (2013.01); B32B 37/0046 (2013.01); B32B 37/10 (2013.01); H01L 21/67092 (2013.01); H01L 21/67288 (2013.01); B32B 37/12 (2013.01); B32B 41/00 (2013.01); B32B 2457/14 (2013.01);
Abstract
An attaching apparatus, a substrate and a support that can be uniformly attached through an adhesive layer. The attaching apparatus is equipped with a set plate and a press plate formed of ceramics. The set plate and the press plate have a flatness of 1.0 μm or less when not pressed.