The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 2017

Filed:

Apr. 10, 2015
Applicant:

Agilent Technologies, Inc., Loveland, CO (US);

Inventors:

Yang Han, Sunnyvale, CA (US);

Miao Zhu, San Jose, CA (US);

Adam Kleczewski, San Francisco, CA (US);

Assignee:

Agilent Technologies, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/42 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01J 3/42 (2013.01); G01J 3/0224 (2013.01); G01J 2003/425 (2013.01);
Abstract

A method and apparatus for measuring diffuse and specularly reflected light from a sample to provide a reflection spectrum as a function of wavelength and as a function of position on a sample is disclosed. The apparatus includes a MIR light source that generates an illumination beam of linearly polarized light. An illumination system illuminates a location on a specimen with part of the illumination beam. A linear polarization filter characterized by a polarization axis that defines a direction of polarization of linearly polarized light that is reflected by the linear polarization filter, a first detector that measures an intensity of light leaving the linear polarization filter and a light collection system collects light reflected from the location on the specimen and directs that light to the linear polarization filter. A controller measures an output from the first detector for each of a plurality of different polarization axis positions.


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