The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 10, 2017

Filed:

Nov. 12, 2013
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventor:

Roland Salzer, Leipzig, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); H01J 37/305 (2006.01); H01L 21/02 (2006.01); B23K 26/03 (2006.01); B23K 26/14 (2014.01); B23K 26/36 (2014.01); G01N 1/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3053 (2013.01); B23K 26/03 (2013.01); B23K 26/14 (2013.01); B23K 26/362 (2013.01); H01J 37/3056 (2013.01); H01L 21/02 (2013.01); G01N 1/32 (2013.01); H01J 2237/3174 (2013.01); H01J 2237/31744 (2013.01);
Abstract

A method for generating a smooth surface in a material-specimen includes generating a substantially smooth, first surface region by removing a first material-volume by particle beam etching. The first material-volume is partially defined by the first surface region. An angle between a beam direction and a surface normal of the first surface region is greater than 80° and less than 90°. The method also includes generating a substantially smooth, second surface region by removing a second material-volume. The second material-volume is partially defined by the first surface region and is partially defined by the second surface region. An angle between the beam direction and a surface normal of the second surface region is less than 60°.


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