The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2017
Filed:
Oct. 31, 2014
Entegris—jetalon Solutions, Inc., Pleasant Hill, CA (US);
Francisco Javier Machuca, Oakland, CA (US);
Kyle William Montgomery, Pleasanton, CA (US);
Ronald Phillip Chiarello, Lafayette, CA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
Embodiments of a dissolved oxygen sensor are disclosed herein. Embodiments as disclosed herein may include a window of optically transparent material disposed in an opening in a fluid flow path, where a luminophor is attached to the side of the window exposed to the fluid in the flow path. An optical probe may be disposed opposite the window from the fluid flow path on an axis at an angle to the window fluid flow path. The optical probe includes an excitation light source for illumination of the luminophor and a reference light source. An optical reception guide is configured to conduct light from the luminophor to a photodiode adjacent to the end of the optical reception guide distal the window when the luminophor is illuminated by the excitation light source. The optical probe is configured to determine a measure of oxygen concentration of the fluid in the flow path. The optical reception guide and photodiode may be aligned on axis, where the axis may be substantially parallel with the axis on which the optical probe is aligned.