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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9536922 B1

PDFFull Text
Date of Patent:
Jan. 03, 2017

Filed:

Dec. 02, 2014

Recess with asymmetric walls and method of fabricating the same

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Ming-Te Lai, Hsinchu, TW;

Chih-Hong Wu, Changhua County, TW;

Feng-Ying Hsu, Taoyuan County, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorneys:

Winston Hsu

Scott Margo

Primary Examiner:

Julio J Maldonado

Assistant Examiner:

Moin Rahman

Int. Cl.
CPC ...
H01L 21/84 (2006.01); H01L 23/48 (2006.01); H01L 27/146 (2006.01); H01L 21/48 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14683 (2013.01); H01L 21/02233 (2013.01); H01L 21/31144 (2013.01); H01L 21/481 (2013.01); H01L 27/14632 (2013.01); H01L 27/14687 (2013.01);
Abstract

A fabricating method of a recess with asymmetric walls includes the steps of providing a substrate comprising a top surface. A recess is formed in the substrate, wherein the recess comprises a first wall, a second wall and a bottom. A patterned mask is formed to cover the substrate. Part of the top surface adjacent to the second wall is exposed through the patterned mask. Finally, the substrate is removed to form a sloping wall, wherein the sloping wall, the first wall and the bottom form a recess with asymmetric walls.

Find Patent Forward Citations

Lai, Ming-Te. (2017). Recess with asymmetric walls and method of fabricating the same (U.S. Patent No. 9536922). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9536922

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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