The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2017

Filed:

May. 28, 2015
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Uwe Lang, Oberkochen, DE;

Christian Crueger, Gerstetten, DE;

Nico Kaemmer, Koenigsbronn, DE;

Christof Riedesel, Essingen, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/00 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/063 (2013.01); H01J 2237/1205 (2013.01); H01J 2237/22 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2447 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2806 (2013.01);
Abstract

A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.


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