The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2017

Filed:

Jun. 25, 2014
Applicant:

Carl Zeiss Microscopy, Llc, Thornwood, NY (US);

Inventors:

John A. Notte, IV, Gloucester, MA (US);

Weijie Huang, North Reading, MA (US);

Raymond Hill, Rowley, MA (US);

FHM-Faridur Rahman, North Andover, MA (US);

Alexander Groholski, Salem, MA (US);

Shawn McVey, Newton, NH (US);

Assignee:

Carl Zeiss Microscopy, LLC, Thornwood, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/08 (2006.01); G21K 5/04 (2006.01); H01J 27/26 (2006.01); H01J 37/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); G21K 5/04 (2013.01); H01J 27/26 (2013.01); H01J 37/18 (2013.01); H01J 2237/002 (2013.01); H01J 2237/0653 (2013.01); H01J 2237/0807 (2013.01);
Abstract

The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.


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