The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Jan. 11, 2016
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Stefan Wolfgang Schmidt, Aalen, DE;
Markus Deguenther, Aalen, DE;
Vladimir Davydenko, Bad Herrenalb, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical hollow waveguide assembly () includes an optical hollow waveguide () for guiding illumination light (). The hollow waveguide () has a tubular main body () with a continuous waveguide cavity (). The waveguide cavity has an illumination light inlet () and an illumination light outlet (). A cavity inner wall () of the waveguide cavity () is configured to be highly reflective for the illumination light () under grazing incidence. A gas source () has a fluid connection () to the waveguide cavity (). The resulting hollow waveguide assembly exhibits a reduced risk of contamination of the hollow waveguide.