The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2017
Filed:
Feb. 20, 2014
Nuflare Technology, Inc., Yokohama, Kanagawa, JP;
Ikunao Isomura, Kanagawa, JP;
NUFLARE TECHNOLOGY, INC, Kanagawa, JP;
Abstract
A pattern inspection method includes acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the first group each not including an adjacent stripe region in plural stripe regions obtained by virtually dividing an inspection region of a target object on which patterns have been formed into the plural stripe regions each partially overlapping an adjacent stripe region, wherein the acquiring is performed using laser lights or electron beams, in a longitudinal direction of the stripe region of the first group, and acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the second group each not including an adjacent stripe region, in remaining stripe regions other than the first group stripe regions, wherein the acquiring is performed using laser lights or electron beams, in the longitudinal direction of the stripe region of the second group.