The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Mar. 05, 2014
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Jung-Hoon Kim, Hwaseong-si, KR;
Jin-A Ryu, Hwaseong-si, KR;
Chang-Ho Lee, Suwon-si, KR;
Dong-Won Kim, Hwaseong-si, KR;
Jae-Ho Kim, Hwaseong-si, KR;
Jung-Dae Park, Ansan-si, KR;
Nae-Ry Yu, Suwon-si, KR;
Pil-Kwon Jun, Seoul, KR;
Abstract
In a method of detecting inhomogeneity of a layer, an incident light may be irradiated to at least two regions of the layer at a first incident angle position. First reflected lights reflected from the two regions of the layer may be sensed. The incident light may be irradiated to the at least two regions of the layer at a second incident angle position. Second reflected lights reflected from the two regions of the layer may be sensed. The first reflected lights and the second reflected lights may be compared with each other to obtain the inhomogeneity of the layer. Thus, the layer having a spot may be found.