The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2016
Filed:
Jul. 10, 2014
Carl Zeiss Sms Gmbh, Jena, DE;
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Carola Blaesing-Bangert, Rothenstein, DE;
Alexander Huebel, Aalen, DE;
Carl Zeizz SMT GmbH, Oberkochen, DE;
Abstract
A method is provided for calibrating a position-measuring system which includes the following steps: a) multiple measurements of positions of a structure of a sample held by a sample stage at different pressures of the gaseous medium in which the sample stage is arranged, b) ascertaining the pressure dependence when determining actual positions by use of an evaluation unit, c) establishing a calibration rule based on the ascertained pressure dependence, and d) applying the calibration rule when determining the actual positions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile