The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Jul. 31, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Ilya Bezel, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Yanming Zhao, Milpitas, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02J 1/02 (2006.01); H05H 1/24 (2006.01); H01J 61/09 (2006.01); H01J 1/02 (2006.01); H01J 23/033 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); H01J 1/025 (2013.01); H01J 23/033 (2013.01); H01J 61/09 (2013.01);
Abstract
A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.