The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2016

Filed:

Apr. 01, 2014
Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventor:

Yu Guan, Pleasanton, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); H01J 13/32 (2006.01); H01J 17/28 (2006.01); H01J 19/74 (2006.01); H01J 61/52 (2006.01); H05B 37/02 (2006.01); B60Q 1/14 (2006.01); F21S 8/10 (2006.01); H05B 33/08 (2006.01); F21Y 101/02 (2006.01); F21Y 103/00 (2016.01);
U.S. Cl.
CPC ...
H05B 37/0227 (2013.01); B60Q 1/14 (2013.01); B60Q 1/143 (2013.01); B60Q 1/1407 (2013.01); B60Q 1/1415 (2013.01); B60Q 1/1423 (2013.01); B60Q 1/1438 (2013.01); B60Q 1/1446 (2013.01); F21S 48/00 (2013.01); F21Y 2101/02 (2013.01); F21Y 2103/003 (2013.01); H05B 33/0869 (2013.01); H05B 33/0872 (2013.01); H05B 37/02 (2013.01);
Abstract

The stabilization of a light-emitting diode (LED) calibration standard includes a light-emitting diode (LED), or an array of LEDs; a cylindrical hood surrounding the LED; an interior baffle for keeping the light output of the LED, and ambient light from behind the LED, from escaping to the other side; a photodetector for receiving the light output of the LED and generating a signal proportional to luminous output; and a hood surrounding the photodetector. A variable current source receives the signal and stabilizes the LED light output by adjusting the operating current of the LED to maintain a constant light output from the LED.


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