The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Feb. 09, 2009
Terry Bluck, Santa Clara, CA (US);
Kevin P. Fairbairn, Los Gatos, CA (US);
Michael S. Barnes, San Ramon, CA (US);
Christopher T. Lane, Los Gatos, CA (US);
Terry Bluck, Santa Clara, CA (US);
Kevin P. Fairbairn, Los Gatos, CA (US);
Michael S. Barnes, San Ramon, CA (US);
Christopher T. Lane, Los Gatos, CA (US);
Brooks Automation Inc., Chelmsford, MA (US);
Abstract
There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers.