The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Oct. 24, 2011
Applicants:
Haruhito Hayakawa, Chiba, JP;
Kouji Abe, Chiba, JP;
Keiichi Terashima, Chiba, JP;
Yuuji Honda, Chiba, JP;
Inventors:
Haruhito Hayakawa, Chiba, JP;
Kouji Abe, Chiba, JP;
Keiichi Terashima, Chiba, JP;
Yuuji Honda, Chiba, JP;
Assignee:
YOUTEC CO., LTD., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/66 (2006.01); G11B 5/72 (2006.01); G11B 5/84 (2006.01); C23C 16/02 (2006.01); C23C 16/34 (2006.01); C23C 16/56 (2006.01); G11B 5/725 (2006.01);
U.S. Cl.
CPC ...
G11B 5/722 (2013.01); C23C 16/0272 (2013.01); C23C 16/347 (2013.01); C23C 16/56 (2013.01); G11B 5/72 (2013.01); G11B 5/725 (2013.01); G11B 5/8408 (2013.01);
Abstract
To provide a CNHfilm of high density and a deposition method. One aspect of the present invention is a CNHfilm formed on a substrate to be deposited,