The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2016
Filed:
Jan. 15, 2014
Photon Dynamics, Inc., San Jose, CA (US);
Orbotech Ltd., Yavne, IL;
Alexander Kadyshevitch, Modi'in, IL;
Ofer Kadar, Sunnyvale, CA (US);
Arie Glazer, Mevaseret, IL;
Ronen Loewinger, San Francisco, CA (US);
Abraham Gross, Tel Aviv, IL;
Daniel Toet, Santa Clara, CA (US);
PHOTON DYNAMICS, INC., San Jose, CA (US);
ORBOTECH LTD., Yavne, IL;
Abstract
A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.