The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
Mar. 14, 2014
Applicant:
Tokyo Electron Limited, Minato-ku, JP;
Inventor:
Tsutomu Hiroki, Nirasaki, JP;
Assignee:
TOKYO ELECTRON LIMITED, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67167 (2013.01); H01L 21/67745 (2013.01);
Abstract
A substrate processing apparatus for processing a substrate includes a transfer device which has a drive motor and transfers a substrate, a peripheral device which has a drive motor and loads and unloads the substrate in substrate-transfer operation of the transfer device, and a control device which conducts drive control on the drive motor of the transfer device and drive control of the drive motor of the peripheral device.