The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2016
Filed:
Mar. 18, 2016
Tokyo Electron Limited, Tokyo, JP;
Yuki Osada, Nirasaki, JP;
Hiroyuki Miyashita, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A tuner () includes a microwave transmission path (), having a coaxial structure, configured to transmit a supplied microwave to a planar slot antenna (); slugs () and (made of a dielectric material and configured to be moved along the microwave transmission path (); a slug driving unit () configured to move the slugs () and () along the microwave transmission path (); and a control unit () configured to perform impedance matching by controlling positions of the slugs such that they are located at a matching position where a reflection coefficient is small, and configured to control, based on a state of the plasma, a matching track through which the slugs () and () reach the matching position.