The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jul. 31, 2015
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Ilya Bezel, Mountain View, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
Yanming Zhao, Milpitas, CA (US);
Gildardo R. Delgado, Livermore, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 1/02 (2006.01); H05H 1/24 (2006.01); H01J 61/09 (2006.01); H01J 23/033 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); H01J 1/025 (2013.01); H01J 23/033 (2013.01); H01J 61/09 (2013.01);
Abstract
A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.