The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jan. 02, 2013
International Business Machines Corporation, Armonk, NY (US);
Jeanne P. Bickford, Essex Junction, VT (US);
Kevin K. Dezfulian, Mount Kisco, NY (US);
Aurelius L. Graninger, Essex Junction, VT (US);
Erik L. Hedberg, Essex Junction, VT (US);
Troy J. Perry, Georgia, VT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Methods and systems for semiconductor line scribe centering are provided. A method includes placing and measuring substantially identical test macros within a chip and in a scribe line. The method also includes establishing an estimate correlation between scribe line measurements taken during a manufacturing process and product measurements taken on a final product. The method also includes determining empirical scribe line specification limits consistent with established product screen limits. The method also includes adjusting the manufacturing process in order to optimize performance to the empirical scribe line specification limits.