The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Dec. 31, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Yu Lei, Belmont, CA (US);
Srinivas Gandikota, Santa Clara, CA (US);
Seshadri Ganguli, Sunnyvale, CA (US);
Bo Zheng, Saratoga, CA (US);
Rajkumar Jakkaraju, San Jose, CA (US);
Martin Jeff Salinas, San Jose, CA (US);
Benjamin Schmiege, Santa Clara, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 21/3205 (2006.01); H01L 21/3213 (2006.01); C23C 16/455 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0228 (2013.01); C23C 16/45551 (2013.01); H01L 21/0217 (2013.01); H01L 21/02175 (2013.01); H01L 21/02183 (2013.01); H01L 21/02186 (2013.01); H01L 21/02194 (2013.01); H01L 21/32051 (2013.01); H01L 21/28562 (2013.01); H01L 21/31116 (2013.01); H01L 21/31122 (2013.01); H01L 21/32136 (2013.01);
Abstract
Provided are atomic layer deposition methods to deposit a film using a circular batch processing chamber with a plurality of sections separated by gas curtains so that each section independently has a process condition.
Lei, Yu. (2016). Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition (U.S. Patent No. 9514933). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9514933
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile