The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 18, 2015
Applicant:
Nuflare Technology, Inc., Yokohama, JP;
Inventor:
Hideo Inoue, Kanagawa, JP;
Assignee:
NuFlare Technology, Inc., Yokohama, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/302 (2006.01); H01J 37/317 (2006.01); G11B 9/10 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3026 (2013.01); H01J 37/3177 (2013.01); G11B 9/10 (2013.01); H01J 2237/30422 (2013.01); H01J 2237/3175 (2013.01); H01J 2237/31715 (2013.01); H01J 2237/31722 (2013.01); H01J 2237/31754 (2013.01); H01J 2237/31762 (2013.01);
Abstract
A shot data generation method includes inputting writing data for writing a pattern on a target object with multi charged particle beams, and generating shot data for each beam of the multi charged particle beams by converting the writing data and using one of a first code indicating a first irradiation time period having been set beforehand, a second code indicating an irradiation time period being zero, and a third code indicating neither the first irradiation time period nor the irradiation time period being zero.