The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Jul. 18, 2011
Applicants:
Alexander Vogler, Aalen, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Andreas Frommeyer, Schwaebisch Gmuend, DE;
Alan L. Brydon, Erding, DE;
Inventors:
Alexander Vogler, Aalen, DE;
Klaus Rief, Aalen-Oberalfingen, DE;
Andreas Frommeyer, Schwaebisch Gmuend, DE;
Alan L. Brydon, Erding, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16F 7/10 (2006.01); G02B 7/00 (2006.01); F16F 7/104 (2006.01); G02B 7/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 7/00 (2013.01); F16F 7/104 (2013.01); G02B 7/02 (2013.01); G03F 7/709 (2013.01); G03F 7/70825 (2013.01);
Abstract
A damping device of an optical element of a projection exposure machine includes at least two mass dampers arranged spaced apart from one another, the vibration absorbers each having at least one damper mass and at least one damping element and the damper masses of the at least two mass dampers being interconnected by at least one connecting element. The optical element can be part of a projection exposure machine.