The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2016
Filed:
Mar. 04, 2014
Fei Company, Hillsboro, OR (US);
Tobias Mayer, Krailling, DE;
Rainer Daum, Wessling, DE;
Matthias Geisbauer, Karlsfeld, DE;
Rudolf Johannes Peter Gerardus Schampers, Tegelen, NL;
Johannes Antonius Hendricus Wilhelmus Gerardus Persoon, Waalre, NL;
FEI COMPANY, Hillsboro, OR (US);
Abstract
The present invention relates to a method of studying a sample using an optical microscope, comprising providing the sample in a sample holder with means to maintain the sample at a temperature below 273 K; providing a microscope objective lens, in a thermally insulating jacket, having an extremal lens element proximal to the sample holder; bringing the lens into a focus position proximal to the sample, which separates the extremal lens element and sample by an intervening space, providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; providing a flow of substantially dry gas in said gap; and tailoring the geometry and velocity of said flow so that, at least in said gap, the flow is non-laminar; and does not excite substantial acoustic vibration in a structure proximal the gap.