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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9511996 B1

PDFFull Text
Date of Patent:
Dec. 06, 2016

Filed:

Jul. 08, 2013

Methods of forming semiconductor structures including mems devices and integrated circuits on common sides of substrates, and related structures and devices

Applicant:

Soitec, Crolles Cedex, FR;

Inventors:

Mariam Sadaka, Austin, TX (US);

Bernard Aspar, Saint-Ismier, FR;

Chrystelle Lagahe Blanchard, Crolles, FR;

Assignee:

SOITEC, Bernin, FR;

Attorney:

TraskBritt

Primary Examiner:

Cuong Q Nguyen

Assistant Examiner:

Nishath Yasmeen

Int. Cl.
CPC ...
H01L 27/14 (2006.01); B81C 1/00 (2006.01); H03H 9/10 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00246 (2013.01); B81B 7/0006 (2013.01); B81C 1/00238 (2013.01); H03H 9/10 (2013.01); B81B 2201/0271 (2013.01); B81B 2207/015 (2013.01); B81C 2203/0735 (2013.01); B81C 2203/0792 (2013.01);
Abstract

Methods are used to form semiconductor devices that include an integrated circuit and a microelectromechanical system (MEMS) device operatively coupled with the integrated circuit. At least a portion of an integrated circuit may be fabricated on a surface of a substrate, and a MEMS device may be formed over the at least a portion of the integrated circuit. The MEMS device may be operatively coupled with the integrated circuit. Semiconductor structures and electronic devices including such structures are formed using such methods.

Find Patent Forward Citations

Sadaka, Mariam. (2016). Methods of forming semiconductor structures including mems devices and integrated circuits on common sides of substrates, and related structures and devices (U.S. Patent No. 9511996). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9511996

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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