The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Feb. 07, 2013
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Antonius Theodorus Wilhelmus Kempen, Rosmalen, NL;
Johan Frederik Dijksman, Weert, NL;
Wilbert Jan Mestrom, Roermond, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); G03F 7/20 (2006.01); B05B 17/06 (2006.01);
U.S. Cl.
CPC ...
H05G 2/006 (2013.01); B05B 17/0653 (2013.01); G03F 7/709 (2013.01); G03F 7/70033 (2013.01); G03F 7/70058 (2013.01); G03F 7/7085 (2013.01); G03F 7/70916 (2013.01);
Abstract
The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (). The method comprises analyzing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.