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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9508914 B1

PDFFull Text
Date of Patent:
Nov. 29, 2016

Filed:

Mar. 14, 2014

Magnetic annealing apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yuji Ono, Iwate, JP;

Toru Ishii, Tokyo, JP;

Makoto Saito, Iwate, JP;

Mitsuru Obara, Iwate, JP;

Yasushi Takeuchi, Iwate, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Abelman, Frayne & Schwab

Primary Examiner:

Scott Kastler

Assistant Examiner:

Michael Aboagye

Int. Cl.
CPC ...
F27D 3/12 (2006.01); H01L 39/02 (2006.01); H01L 43/12 (2006.01); F27B 5/06 (2006.01); F27B 5/12 (2006.01); F27B 5/13 (2006.01); F27D 3/00 (2006.01); F27D 11/12 (2006.01); F27D 19/00 (2006.01); C21D 1/04 (2006.01);
U.S. Cl.
CPC ...
H01L 39/02 (2013.01); F27B 5/06 (2013.01); F27B 5/12 (2013.01); F27B 5/13 (2013.01); F27D 3/0024 (2013.01); F27D 3/0084 (2013.01); F27D 11/12 (2013.01); F27D 19/00 (2013.01); H01L 43/12 (2013.01); C21D 1/04 (2013.01); C21D 2281/00 (2013.01); F27D 2003/0003 (2013.01); F27D 2003/0018 (2013.01);
Abstract

Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device; a workpiece boat; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit; a magnetic field generating unit; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.

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