The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2016
Filed:
Jul. 04, 2011
Wilhelmus Henricus Theodorus Maria Aangenent, 's-Hertogenbosch, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Rick Scholte, Eindhoven, NL;
Ines Lopez Arteaga, Eindhoven, NL;
Wilhelmus Henricus Theodorus Maria Aangenent, 's-Hertogenbosch, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Rick Scholte, Eindhoven, NL;
Ines Lopez Arteaga, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
SORAMA HOLDING B.V., Eindhoven, NL;
TECHNISCHE UNIVERSITEIT EINDHOVEN, Eindhoven, NL;
Abstract
A lithographic apparatus includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; a sensor array positioned and arranged to detect an acoustic wave from a movable part of the lithographic apparatus, a controller, the controller having a controller input connected to the sensor array so as to receive a sensor array output signal, and a controller output connected to at least one actuator arranged to act on the movable part, the controller being arranged to: calculate a movement of the movable part from the sensor array output signal, and drive via the controller output the at least one actuator in response to the calculated movement.